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		<citationkey>MarcianoBoneSantTrav:2007:GrRaOp</citationkey>
		<title>Growth Rate Optimization of Diamond-like Carbon Films for Industrial Application</title>
		<year>2007</year>
		<secondarytype>PRE CN</secondarytype>
		<author>Marciano, Fernanda Roberta,</author>
		<author>Bonetti, Luis Fernando,</author>
		<author>Santos, Lúcia Vieira,</author>
		<author>Trava-Airoldi, Vladimir Jesus,</author>
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		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
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		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<conferencename>Encontro sobre Diamante, Carbono Amorfo, Nanotubos de Carbono e Materiais Relacionados.</conferencename>
		<conferencelocation>Fortaleza, CE</conferencelocation>
		<date>24-26 out.</date>
		<tertiarytype>Poster</tertiarytype>
		<transferableflag>1</transferableflag>
		<contenttype>External Contribution</contenttype>
		<abstract>Diamond-like Carbon (DLC) film is a semiconductor with a high mechanical hardness, low friction coefficient, chemical inertness, and optical transparency [1]. Due to these properties, the use of DLC coatings in mechanical and electrical fields has propelled, and recently, make it possible for new applications in food, beverage and biological market segments [2]. These films are now used in numerous industrial applications, including razor blades, magnetic hard discs, critical engine parts, mechanical face seals, scratchresistant glasses, invasive and implantable medical devices and microelectromechanical systems [3]. Among all DLC growth parameters, the growth rate has been the focus for many application when an industrial scaling up is apparent. Thinking on this, vapor of hexane was used as a feed gas in order to growth a good quality DLC film on different kind of substrate. It was used a pulsed valve to injected the vapor of hexane into the deposition chamber whilst the film was grown with methane. Hexane was chosen because it has six carbons chain with only C-C and C-H single bonds in each molecule, increasing the hydrocarbon source. The hardness and friction coefficient were evaluated by using nanoindentation and pin-on disc tribometer, respectively. Raman scattering spectroscopy was used to characterize the quality of these films. The stress of DLC was measured by prophilometry. The growth rate as a function of the partial vapor pressure of hexane inside the chamber will be exhaustively studied. Growth rate up to five times higher than pure methane is used will be shown.</abstract>
		<area>FISMAT</area>
		<language>en</language>
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